Specifications*
General
Operational Temperature Range: 3.2 to 350K
Vacuum Pressure Range: 1E-7 Torr to Ambient
Maximum Physical Size (not including stage wiring connector):
24 mm (length)
24 mm (Width
51 mm (Height)
CE certified
Multi-stack support
Performance
Travel Range (XYZ) >5 x 5 x 5 mm
Payload:
>200g @ 300K
>100g @ 4K
Vibrations on Top of Stack (P-P): < 50 nm
Drive Velocity: >0.5 mm/sec
Bi-Directional Run-Out: <8 μm
Open-Loop Mode Minimum Incremental Motion: <40 nm
Closed-Loop Mode Minimum Incremental Motion: <500 nm
Bi-Directional 3-D Point Repeatability (closed-loop only): <10 μm
Sensor Resolution (closed-loop only): <200 nm
Software
Drive Modes: open-loop mode or closed-loop mode
Programmatic Control: ability to write custom sequences
*Preliminary specs - guaranteed minimum performance of product; specifications and performance subject to change.