General

Operational Temperature Range: 3.2 to 350K

Vacuum Pressure Range: 1E-7 Torr to Ambient

Maximum Physical Size (not including stage wiring connector):
24 mm (length)
24 mm  (Width
51 mm  (Height)

CE certified

Multi-stack support

Performance

Travel Range (XYZ) >5 x 5 x 5 mm

Payload:
>200g @ 300K
>100g @ 4K

Vibrations on Top of Stack (P-P): < 50 nm

Drive Velocity: >0.5 mm/sec

Bi-Directional Run-Out: <8 μm

Open-Loop Mode Minimum Incremental Motion: <40 nm

Closed-Loop Mode Minimum Incremental Motion: <500 nm

Bi-Directional 3-D Point Repeatability (closed-loop only): <10 μm

Sensor Resolution (closed-loop only): <200 nm  

Software

Drive Modes: open-loop mode or closed-loop mode

Programmatic Control: ability to write custom sequences

*Preliminary specs - guaranteed minimum performance of product; specifications and performance subject to change.

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